Poyerekeza ndi silicon-based power semiconductors, SiC (silicon carbide) mphamvu ya semiconductors ili ndi ubwino waukulu pakusintha pafupipafupi, kutaya, kutaya kutentha, miniaturization, ndi zina zotero.
Ndi kupanga kwakukulu kwa ma silicon carbide inverters opangidwa ndi Tesla, makampani ochulukirapo ayambanso kupanga zinthu za silicon carbide.
SiC ndi "chodabwitsa", kodi chinapangidwa bwanji padziko lapansi?Kodi ntchito ndi ziti tsopano?Tiyeni tiwone!
01 ☆ Kubadwa kwa SiC
Monga ma semiconductors ena amagetsi, mndandanda wamakampani a SiC-MOSFET umaphatikizapokristalo wautali - gawo lapansi - epitaxy - kapangidwe - kupanga - ulalo wolongedza.
Mwala wautali
Pa ulalo wautali wa kristalo, mosiyana ndi kukonzekera kwa njira ya Tira yomwe imagwiritsidwa ntchito ndi silikoni imodzi ya crystal, silicon carbide imagwiritsa ntchito njira yoyendetsera gasi (PVT, yomwe imadziwikanso kuti njira yabwino ya Lly kapena seed crystal sublimation), kutentha kwambiri kwa gasi wamafuta (HTCVD) ) zowonjezera.
☆ Njira yayikulu
1. Carbonic olimba zopangira;
2. Pambuyo pakuwotcha, cholimba cha carbide chimakhala mpweya;
3. Kusuntha kwa gasi pamwamba pa kristalo wa mbewu;
4. Gasi amamera pamwamba pa kristalo wa mbewu kukhala kristalo.
Gwero lachithunzi: "Technical Point to disassemble PVT kukula silicon carbide"
Kupanga kosiyanasiyana kwadzetsa zovuta ziwiri zazikulu poyerekeza ndi maziko a silicon:
Choyamba, kupanga kumakhala kovuta ndipo zokolola zimakhala zochepa.Kutentha kwa gawo la gasi lochokera ku kaboni limakula pamwamba pa 2300 ° C ndipo kupanikizika ndi 350MPa.Bokosi lonse lamdima limachitidwa, ndipo ndizosavuta kusakaniza mu zonyansa.Zokolola ndizochepa kuposa maziko a silicon.Kukula kwake kumakhala kocheperako.
Chachiwiri ndi kukula pang'onopang'ono.Njira ya Governance of the PVT ndi yochedwa kwambiri, liwiro ndi pafupifupi 0.3-0.5mm / h, ndipo imatha kukula 2cm m'masiku 7.Kukula kumatha kukula 3-5cm, ndipo m'mimba mwake mwa kristalo ingot nthawi zambiri imakhala mainchesi 4 ndi mainchesi 6.
72H yochokera ku Silicon imatha kukula mpaka kutalika kwa 2-3m, yokhala ndi mainchesi 6 ndi mainchesi 8 kupanga kwatsopano kwa mainchesi 12.Chifukwa chake, silicon carbide nthawi zambiri imatchedwa crystal ingot, ndipo silicon imakhala ndodo ya kristalo.
Carbide silicon crystal ingots
Gawo lapansi
Pambuyo pa kristalo wautali wamalizidwa, umalowa mu njira yopangira gawo lapansi.
Pambuyo kudula akulimbana, akupera (akupera movutitsa, akupera bwino), kupukuta (makina kupukuta), kopitilira muyeso kupukuta (mankhwala makina kupukuta), gawo lapansi la silicon carbide limapezeka.
Gawo lapansi limasewera kwambiriudindo wa chithandizo chakuthupi, conductivity matenthedwe ndi madutsidwe.Kuvuta kwa kukonza ndikuti zinthu za silicon carbide ndizokwera, zowoneka bwino, komanso zokhazikika pamapangidwe amankhwala.Chifukwa chake, njira zachikhalidwe zopangira silicon sizoyenera gawo lapansi la silicon carbide.
Ubwino wa kudula kumakhudza mwachindunji magwiridwe antchito ndi kugwiritsa ntchito bwino (mtengo) wa zinthu za silicon carbide, chifukwa chake zimafunika kukhala zazing'ono, makulidwe a yunifolomu, komanso kudula kochepa.
Pakadali pano,4-inch ndi 6-inch makamaka amagwiritsa ntchito zida zodulira mizere yambiri,kudula makhiristo a silicon m'magawo oonda osapitilira 1mm.
Mipikisano mizere kudula schematic chithunzi
M'tsogolomu, ndi kuwonjezeka kwa kukula kwa zophika za carbonized silicon, kuwonjezeka kwa zofunikira zogwiritsira ntchito zinthu kudzawonjezeka, ndipo matekinoloje monga laser slicing ndi kulekanitsa ozizira adzagwiritsidwanso ntchito pang'onopang'ono.
Mu 2018, Infineon adapeza Siltectra GmbH, yomwe idapanga njira yatsopano yotchedwa kusweka kozizira.
Poyerekeza ndi njira yachikhalidwe yodulira mawaya ambiri a 1/4,Kuzizira kozizira kunangotaya 1/8 ya zinthu za silicon carbide.
Kuwonjezera
Popeza zinthu za silicon carbide sizingapange zida zamagetsi mwachindunji pagawo, zida zosiyanasiyana zimafunikira pazowonjezera.
Choncho, kupanga gawo lapansili kumalizidwa, filimu imodzi yokha yopyapyala ya kristalo imakula pa gawo lapansi kudzera mu njira yowonjezera.
Pakalipano, njira ya chemical gas deposition (CVD) imagwiritsidwa ntchito makamaka.
Kupanga
Gawoli likapangidwa, limalowa mu gawo la mapangidwe azinthu.
Kwa MOSFET, cholinga cha mapangidwe ake ndi mapangidwe a poyambira,mbali imodzi kupewa kuphwanya patent(Infineon, Rohm, ST, etc., ali ndi mapangidwe a patent), ndi mbali inakukumana ndi mtengo wopangira ndi kupanga.
Kukonzekera kwa Wafer
Mapangidwe azinthu akamalizidwa, amalowa mugawo lopanga mkate,ndipo ndondomekoyi imakhala yofanana ndi ya silicon, yomwe imakhala ndi masitepe 5 otsatirawa.
☆ Khwerero 1: Bayitsani chigoba
Filimu ya silicon oxide (SiO2) imapangidwa, photoresist imakutidwa, chithunzi cha photoresist chimapangidwa kupyolera muzitsulo za homogenization, kuwonetseredwa, chitukuko, ndi zina zotero, ndipo chiwerengerocho chimasamutsidwa ku filimu ya oxide kupyolera mu ndondomeko yowunikira.
☆ Gawo 2: Kuyika kwa ion
Chophimba chophimba chophimba cha silicon carbide chimayikidwa mu implanter ya ion, pomwe ma ion aluminiyamu amabayidwa kuti apange P-mtundu wa doping zone, ndikumangidwira kuti atsegule ma ion a aluminiyamu oyikidwa.
Filimu ya okusayidi imachotsedwa, ma ayoni a nayitrogeni amabayidwa kudera linalake la dera la P-mtundu wa doping kuti apange gawo la N-mtundu wa kukhetsa ndi gwero, ndipo ma ayoni opangidwa ndi nayitrogeni amalowetsedwa kuti ayambitse.
☆ Gawo 3: Pangani gululi
Konzani gridi.M'dera lomwe lili pakati pa gwero ndi kukhetsa, chipata cha oxide wosanjikiza chimakonzedwa ndi kutentha kwa oxidation, ndipo gawo la electrode la pachipata limayikidwa kuti lipange chipata chowongolera.
☆ Khwerero 4: Kupanga magawo oletsa
Passivation wosanjikiza wapangidwa.Ikani wosanjikiza wa passivation wokhala ndi mawonekedwe abwino otchinjiriza kuti mupewe kuwonongeka kwa interelectrode.
☆ Khwerero 5: Pangani ma elekitirodi otulutsa madzi
Pangani drain ndi source.Chosanjikiza cha passivation ndi perforated ndi zitsulo spttered kupanga kukhetsa ndi gwero.
Gwero la zithunzi: Xinxi Capital
Ngakhale pali kusiyana pang'ono pakati ndondomeko mlingo ndi pakachitsulo zochokera, chifukwa cha makhalidwe silicon carbide zipangizo,Kuyika kwa ma ion ndi kuyatsa kuyenera kuchitika pamalo otentha kwambiri(mpaka 1600 ° C), kutentha kwakukulu kumakhudza kapangidwe ka lattice kwa zinthuzo, ndipo zovuta zidzakhudzanso zokolola.
Kuphatikiza apo, pazigawo za MOSFET,ubwino wa chipata mpweya zimakhudza mwachindunji kayendedwe kanjira ndi kudalirika kwa chipata, chifukwa pali mitundu iwiri ya silicon ndi maatomu a kaboni muzinthu za silicon carbide.
Choncho, njira yapadera yopangira chipata chapakati ikufunika (mfundo ina ndi yakuti pepala la silicon carbide ndi lowonekera, ndipo kugwirizanitsa malo pa photolithography kumakhala kovuta kwa silicon).
Mukamaliza kupanga chophatikizira, chip payekha chimadulidwa kukhala chip chopanda kanthu ndipo chikhoza kupakidwa molingana ndi cholinga.Njira yodziwika bwino pazida zodziwikiratu ndi TO phukusi.
650V CoolSiC™ MOSFETs mu TO-247 phukusi
Chithunzi: Infineon
Munda wamagalimoto uli ndi mphamvu zambiri komanso zofunikira zowotcha kutentha, ndipo nthawi zina ndikofunikira kupanga mabwalo amlatho mwachindunji (theka la mlatho kapena mlatho wathunthu, kapena wophatikizidwa mwachindunji ndi ma diode).
Chifukwa chake, nthawi zambiri amaphatikizidwa mwachindunji mu ma module kapena machitidwe.Malingana ndi chiwerengero cha tchipisi chomwe chimayikidwa mu gawo limodzi, mawonekedwe odziwika ndi 1 mu 1 (BorgWarner), 6 mu 1 (Infineon), ndi zina zotero, ndipo makampani ena amagwiritsa ntchito ndondomeko yofanana ya chubu limodzi.
Borgwarner Viper
Imathandizira kuziziritsa kwamadzi kwa mbali ziwiri ndi SiC-MOSFET
Ma module a Infineon CoolSiC™ MOSFET
Mosiyana ndi silicon,ma silicon carbide modules amagwira ntchito pa kutentha kwakukulu, pafupifupi 200 ° C.
Traditional zofewa solder kutentha kusungunuka mfundo kutentha ndi otsika, sangathe kukwaniritsa zofunika kutentha.Choncho, silicon carbide zigawo zambiri ntchito otsika kutentha siliva sintering ndondomeko kuwotcherera.
Module ikamalizidwa, imatha kugwiritsidwa ntchito pamagawo agawo.
Tesla Model3 wowongolera mota
Chip chopanda kanthu chimachokera ku ST, phukusi lodzipangira nokha ndi makina oyendetsa magetsi
☆02 Magwiritsidwe ntchito a SiC?
M'munda wamagalimoto, zida zamagetsi zimagwiritsidwa ntchito kwambiriDCDC, OBC, ma inverters amagetsi, ma inverters amagetsi amagetsi, ma waya opanda zingwe ndi magawo ena.zomwe zimafuna kutembenuka mwachangu kwa AC/DC (DCDC makamaka imachita ngati chosinthira mwachangu).
Chithunzi: BorgWarner
Poyerekeza ndi zida zopangira silicon, zida za SIC ndizokwera kwambirimphamvu yayikulu ya avalanche yakuwonongeka kwamunda(3 × 106V/cm),bwino matenthedwe madutsidwe(49W/mK) ndikusiyana kwakukulu kwa bandi(3.26 eV).
Kuchuluka kwa kusiyana kwa bandi, kumachepetsa kutayikira kwapano komanso kumapangitsa kuti ntchitoyo ikhale yabwino.Ubwino wa matenthedwe matenthedwe, m'pamenenso kachulukidwe kakali pano.Kulimba kwa gawo lowonongeka kwa avalanche ndiko, kukana kwamagetsi kwa chipangizocho kumatha kupitilizidwa.
Chifukwa chake, pankhani yamagetsi okwera kwambiri, ma MOSFET ndi SBD okonzedwa ndi zida za silicon carbide kuti alowe m'malo mwa kuphatikiza kwa silicon-based IGBT ndi FRD kungathe kupititsa patsogolo mphamvu ndi magwiridwe antchito,makamaka muzochitika zogwiritsira ntchito pafupipafupi kuti muchepetse kutayika kwa kusintha.
Pakadali pano, ndizotheka kukwaniritsa ntchito zazikuluzikulu zama motor inverters, zotsatiridwa ndi OBC ndi DCDC.
800V voteji nsanja
Mu nsanja yamagetsi ya 800V, mwayi wama frequency apamwamba umapangitsa mabizinesi kukhala okonda kusankha njira ya SiC-MOSFET.Chifukwa chake, ambiri mwadongosolo lamakono la 800V lamagetsi la SiC-MOSFET.
Kukonzekera kwapapulatifomu kumaphatikizapoE-GMP yamakono, GM Otenergy - malo ojambulira, Porsche PPE, ndi Tesla EPA.Kupatulapo zitsanzo za nsanja za Porsche PPE zomwe sizinyamula SiC-MOSFET mwachindunji (chitsanzo choyamba ndi IGBT yochokera ku silica), nsanja zina zamagalimoto zimagwiritsa ntchito njira za SiC-MOSFET.
Universal Ultra energy nsanja
Kukonzekera kwachitsanzo kwa 800V ndikokwanira,mtundu wa Great Wall Salon Jiagirong, mtundu wa Beiqi pole Fox S HI, galimoto yabwino S01 ndi W01, Xiaopeng G9, BMW NK1, Changan Avita E11 ananena kuti adzanyamula 800V nsanja, kuwonjezera BYD, Lantu, GAC 'an, Mercedes-Benz, ziro Thamanga, FAW Red Flag, Volkswagen ananenanso 800V luso kafukufuku.
Kuchokera pamayendedwe a 800V omwe adapezedwa ndi ogulitsa Tier1,BorgWarner, Wipai Technology, ZF, United Electronics, ndi Huichuanonse adalengeza ma 800V oyendetsa magetsi.
400V voteji nsanja
Mu pulatifomu ya 400V yamagetsi, SiC-MOSFET imayang'ana kwambiri mphamvu zamphamvu ndi kachulukidwe kamphamvu komanso kuchita bwino kwambiri.
Monga injini ya Tesla Model 3\Y yomwe yapangidwa mochuluka tsopano, mphamvu yapamwamba ya BYD Hanhou motor ili pafupi 200Kw (Tesla 202Kw, 194Kw, 220Kw, BYD 180Kw), NIO idzagwiritsanso ntchito zinthu za SiC-MOSFET kuyambira ET7 ndi ET5 yomwe idzalembedwe pambuyo pake.Peak mphamvu ndi 240Kw (ET5 210Kw).
Kuphatikiza apo, potengera kuchita bwino kwambiri, mabizinesi ena akuwunikanso kuthekera kwazinthu zothandizira kusefukira kwamadzi za SiC-MOSFET.
Nthawi yotumiza: Jul-08-2023